|Contact Us  Global

Park Systems, world-leading manufacturer of Atomic Force Microscopes AFM will showcase their newly launched Park NX-TSH, the only automated Tip Scan Head for large sample analysis over 300 mm at the SEMI Technology Unites Global Summit Feb. 15-19, 2021. Park NX-TSH is for large and heavy sample flat panel display glass, 2D encoder sample and features conductive AFM for electric defect analysis by integrating a micro probe station.

The global organic LED (OLED) market size was valued at USD 32,463.5 Million in 2019 and is projected to reach USD 203,069.9 Million by 2027, registering a CAGR of 21.7% from 2020 to 2027. Major factors driving OLED market size growth are high demand for cost-effective and energy-saving OLED lighting, increased government initiatives to adopt OLED, and growth in the market for display and large screen backlights.

The Tip Scanning Head (TSH) is an automated moving tip head for industrial AFM measurements on large samples over 300 mm developed for OLED, LCD, Photonics for large sample analysis. The automated Tip Scan Head moves on an air-bearing stage technology and combines the x, y, z scanners moving directly to the desired point on the substrate. The automated Tip Scan Head moves on an air-bearing stage technology combining the x, y, z scanners and moving directly to the desired point on the substrate.

“Park NX-TSH was developed specifically for manufacturers setting up fabs to produce next-generation flat panel displays with the objective to overcome the 300mm size threshold limit,” states Keibock Lee, Park Systems President. “Using conductive AFM, Park NX TSH measures the sample surface with an optional probe station that contacts the sample surface and provides current into small devices or chips.”

The automated tip scanning system overcomes nano metrology challenges with a gantry style tip scanner system that moves directly to a place on the sample and produces high resolution images of the roughness measurement, step height measurement, critical dimension measurement & sidewall measurement.

“Park Systems has scaled up their AFM tools for Gen10+ and all large flat panel displays using Park NX-TSH (Tip Scanning Head) system, and is the only automated Tip Scan Head for large sample analysis over 300mm,” adds Lee.

The sample is fixed on a sample chuck and the tip scanning head attached to the gantry moves to measurement positions on the surface sample. The Tip scanning head system overcomes the limitations of sample size and weight since the sample is fixed on the sample chuck.

Atomic force microscopy is the most accurate, and non-destructive, method of measuring samples at nanoscale and with Park NX-TSH, reliable, high resolution AFM images can be obtained on OLEDs, LCDs, photomasks, and more in a gantry style bridge system improving productivity and quality.

Visit the Park Systems Booth at SEMI Technology Unites Global Conference to meet with one of our reps online or send an This email address is being protected from spambots. You need JavaScript enabled to view it..

About Park Systems

Park Systems is the fastest growing and world-leading manufacturer of atomic force microscopy (AFM) systems, with a complete range of products for researchers and engineers in the chemistry, materials, physics, life sciences, semiconductor and data storage industries. Our mission is to enable nanoscale advances for scientists and engineers solving the world’s most pressing problems and pushing the boundaries of scientific discoveries and engineering innovations. Customers of Park Systems include most of the world’s top 20 largest semiconductor companies and national research universities in Asia, Europe and the Americas. Park Systems is a publicly traded corporation on the Korea Stock Exchange (KOSDAQ) with corporate headquarters in Suwon, Korea, and regional headquarters in Santa Clara, California, USA, Mannheim, Germany, Beijing, China, Tokyo, Japan, Singapore, and Mexico City, Mexico. To learn more about Park Systems, please visit http://www.parksystems.com.

Park News - Press Release | Park Atomic Force Microscope