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Large Sample AFM Revealed
Thank you for joining our exclusive online showcase where we unveiled the future of Large Sample AFM. Fill out the form to unlock full access to the product demonstration video.
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Key Features
High-Precision & Versatile Performance
  • • Ensures minimal thermal drift and exceptional stability with an advanced mechanical structure
  • • Accommodates a wide range of sample sizes, from small specimens to 300 mm wafers
  • • Supports advanced nano-IR spectroscopy (PiFM) for precise chemical analysis
Simplified Workflow with Automated Features
  • • Automatic probe exchange with 16 slots for efficient multi-experiment setups
  • • Streamlines setup with automated tip mounting and laser beam alignment
  • • StepScan™ feature for automated sequential measurements at multiple coordinates
  • • Macro optics with wide field of view, covering 200 mm wafer samples
Specialized Features for Industrial AFM Applications
  • • Specialized industrial R&D applications with recipe-based routine measurements.
  • • Integrated industrial-grade facility featuring a signal tower with an emergency-off unit, a facility controller, and optional contamination control solutions using a fan filter unit
Park FX200 Smart Simulator
Explore Park Systems' AFM technology anytime, anywhere. 
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Park nano-IR Spectroscopy
Advanced Nano-IR Spectroscopy for Large Sample Chemical Analysis
Park nano-IR combines IR spectroscopy and AFM in a single system. It enables chemical identification with <5 nm spatial resolution using a safe, non-contact method. The AFM provides 3D nanometer topography with sub-angstrom accuracy and mechanical property insights.
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Which Large Sample AFM is right for you?
FX200_img
FX200_img
Park FX200
The Most Advanced AFM for Samples from Small Sizes up to 200 mm
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FX300_img
FX300_img
Park FX300
Premier 300 mm AFM for Research, Quality Control, and Assurance
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Applications
Semiconductor
Patterned Si Device
Semiconductor
Cu Pad
Polymer
Hyper-branched Polymer
Polymer
Polystyrene Beads
2D Materials
tBG on hBN
Nanoelectrical Applications
Perovskite
Nanomechanical Applications
Battery Film Diaphragm
Nanoscale IR Spectroscopy
e-Beam Damage on ArF Photo Resist
Unlock FX200 Advantage
Transform your AFM workflows with powerful automation
The FX200 is the latest large-sample Atomic Force Microscope (AFM) designed to enhance nanoscale surface analysis with advanced automation. This technical note provides a detailed overview of its key features, automation capabilities, improved sample navigation, StepScan technology, and experimental management system.
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