Park NX20 Lite Specifications
Scanner
Z Scanner
Flexure guided high-force scanner
Scan range: 15 μm (optional 30 μm)
XY Scanner
Single module flexure XY-scanner with closed-loop control
Scan range: 100 µm × 100 µm
Stage
XY stage travel range: 200 mm (Motorized) (150 mm optional),
optional precision encoders for better XY stage repeatability
Z stage travel range: 25.5 mm (Motorized),
optional precision encoder for better Z stage repeatability
Focus stage travel range: 8 mm (Motorized)
Sample Mount
Sample size: Up to 200 mm wafer sample
(Optional 200 mm Vacuum Sample Chuck)
On-Axis Optics
10x (0.21 N.A.) ultra-long working distance lens (1µm resolution)
Direct on-axis vision of sample surface and cantilever
Field-of-view : 480 × 360 µm (with 10× objective lens)
CCD : 1.2 M pixel, 5 M pixel (optional)
(optional; Field-of-view: 840 µm x 630 µm)
Software
SmartScan™
• AFM system control and data acquisition software
• Auto mode for quick setup and easy imaging
• Manual mode for advanced use and finer scan control
SmartAnalysis™
• AFM data analysis software
• Stand-alone design—can install and analyze data away from AFM
• Capable of producing 3D renders of acquired data
Electronics
4 channels of flexible digital lock-in amplifier
Spring constant calibration (Thermal method)
Digital Q control
Options/Modes
Standard Imaging
True Non-Contact
Contact
Tapping
PinPoint™ AFM
Lateral Force Microscopy (LFM)
Phase Imaging
Force Measurement
Dielectric/Piezoelectric Properties
Electric Force Microscopy (EFM)
Piezoresponse Force Microscopy (PFM)
PFM with High Voltage*
Mechanical Properties
Force Modulation Microscopy (FMM)
Nanoindentation
Nanolithography*
Nanolithography with High Voltage*
Nanomanipulation*
Magnetic Properties
Chemical Properties*
Chemical Force Microscopy with Functionalized Tip
Electrochemical Microscopy (EC-AFM)
Accessories*
• Universal Liquid Cell with Temperature Control
• Temperature Controlled Stage 1, 2 and 3
• Electrochemistry Cell
• High-field Magnetic Field Generator