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    NX20 Lite
    AFM Specifications

Park NX20 Lite Specifications

Scanner

Z Scanner

Flexure guided high-force scanner
Scan range:
15 μm (optional 30 μm)

XY Scanner

Single module flexure XY-scanner with closed-loop control
Scan range:
100 µm × 100 µm

 

Stage

Z stage

Motorized Z stage travel range: 25.5mm,
optional precision encoder for better stage repeatability

XY stage

Motorized XY stage travel range:
150 mm (200 mm optional),
optional precision encoders for better XY stage repeatability

 

Sample Mount

Sample size: Up to 150 mm wafer sample
Up to 200 mm wafer sample
(Optional 200 mm Vacuum Sample Chuck)

 

Software

SmartScan™

AFM system control and data acquisition software
Auto mode for quick setup and easy imaging
Manual mode for advanced use and finer scan control

SmartAnalysis™

AFM data analysis software
Stand-alone design—can install and analyze data away from AFM
Capable of producing 3D renders of acquired data

 

Dimensions in mm

NX20 Lite demensions

Park NX20 Lite - Specifications | Park Atomic Force Microscope