Etch FrictionalForceMicroscopy dielectric trench TCS SAM Battery LMF rubber LiftHeight tip_bias_mode ElectroDeposition ReflexLens mfm_amplitude ito_film Boundary fe_nd_b HexagonalBoronNitride FM-KPFM Phthalocyanine Vanadate FailureAnlaysis Chemical_Vapor_Deposition Fet self-assembled_monolayer Bmp Imprint Subhajjit atomic_steps Nanostructure Reduction Vac NCM\ Oxidation piezoelectric force microscopy LiquidCell