Park Nanostandard Store
Z Scale Calibrator
Option Description
ZSC12-200 sample consists of 200 nm step height uniform bar (10 μm, 50 μm wide). (Certified) This sample is designed for Z calibration.
Manufactured by Kims Reference Corp. (internationally accredited reference materials producer from ILAC-MRA and KOLAS via ISO-17034)
Specifications
- Line widths: 10 / 50 μm
- Step height: 200 nm
- Chip size: 5 mm × 5 mm
- Pattern size: 1 mm × 1 mm
- Material: SiO₂ on Si
- Substrate: 300 mm wafer (ZSC12-200) / 200 mm wafer (ZSC08-200)
- Traceability: Si lattice constant measured by TEM
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