Defects of LiNbO₃ wafer
Scanning Conditions
- System: FX40
- Scan Mode: True Non-Contact™ Mode
- Scan Rate: All 0.3 Hz
- Scan Size: All 8.5 µm×8.5 µm
- Pixel Size: All 512×256
- Cantilever: PPP-NCHR (k=42 N/m, f=320 kHz)
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