Microlens Array
The microlens array was characterized in True Non-contact mode. The scan image clearly shows the periodic lens structures with a peak-to-valley height of about 12.7 µm.
Scanning Conditions
- System: NX15
- Scan Mode: True Non-contact™ mode
- Scan Rate: 0.2 Hz
- Scan Size: 100 µm × 100 µm
- Pixel Size: 512 × 256 pixels
- Peak-to-valley: 12.7 µm
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