Li-ion Battery on Si substrate
A Li-ion Battery on Si substrate was measured in Scanning spread resistance microscopy to acquire spread resistance. The scan data revealed a peak-to-valley resistance difference of 51.7 GΩ, and the image shows various shape in battery.
Scanning Conditions
- System: NX20
- Sample: Li-ion Battery on Si substrate
- Scan Mode: Scanning spread resistance microscopy (Channel: Resistance)
- Scan Rate: 0.2 Hz
- Scan Size: 20 µm × 20 µm
- Pixel Size: 512 × 512 pixels
- Peak-to-valley: 51.7 GΩ
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