CMP test key
A CMP test key was measured in True Non-contact mode to acquire the surface topography. The image shows the hexagonal pattern of the CMP test key.
Scanning Conditions
- System: NX20
- Sample: CMP test key
- Scan Mode: True Non-contact™ mode
- Scan Rate: 0.6 Hz
- Scan Size: 15 µm × 15 µm
- Pixel Size: 512 × 256 pixels
- Peak-to-valley: 239.4 nm
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