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Accurate AFM Solutions for General Research

Tall Sample 1.5 µm step height

  • Scan Mode: Non-contact mode, Topography from Z position sensor

Flat Sample Atomic steps of sapphire wafer

  • 0.3 nm step height, Scan Mode: Non-contact mode, Topography from Z position sensor

Hard Sample Tungsten film

  • Scan Mode: Non-contact mode, Topography from Z position sensor

Soft Sample Collagen fibril

  • Scan Mode: Non-contact mode, Topography from Z position sensor

Accurate AFM Measurement with Low Noise Z Detector

Low Noise Z Detector of Park NX10 AFM

  • Key technological advance and design feature of NX platform
  • Noise level is the lowest in the industry, unmatched by any other
  • Used as the default topography signal

The Z detector is the key technological advance of the new NX-series AFM. It is a new type of strain gauge sensor, innovated by Park. At 0.2 Angstrom, it is the best Z-detector noise in the industry. The noise level is low enough for Z-detector to be used as the default topography signal. If we compare the new NX-series AFM with previous generation of our AFM model, XE, one can tell the difference. If the Z-detector noise is too high, one cannot clearly observe the atomic steps on sapphire wafer. The height signal from the Z detector of the Park NX AFM has the noise level, identical to that of the Z-voltage-based topography.


Park NX Series

Z-detector-img-nx The noise level of the Z position detectors of the Park NX
Z-detector-img-nx2 The topography images of a sapphire wafer obtained from NX-10

Park XE Series

Z-detector-img-xe The noise level of the Z position detectors of the Park XE
Z-detector-img-xe2 The topography images of a sapphire wafer obtained from XE-100

Accurate AFM Scan by True Non-Contact™ Mode

True Non-Contact™ Mode

  • Less tip wear = Prolonged high-resolution scan
  • Non-destructive tip-sample interaction = Minimized sample modification
  • Immunity from parameter dependent results

Tapping Imaging

  • Quick tip wear = Blurred low-resolution scan
  • Destructive tip-sample interaction = Sample damage and modification
  • Highly parameter-dependent

The Best User Convenience by Design

Easy Tip and Sample Exchange


The unique head design allows easy side access allowing you to easily snap new tips and samples into place by hand. The cantilever is ready for scanning without the need for any tricky laser beam alignment by using pre-aligned cantilevers mounted on to the cantilever tip holder.

Lightning Fast Automatic Tip Approach


Our automatic tip to sample approach requires no user intervention and engages in just 10 seconds after loading the cantilever. By monitoring the cantilever response to the approaching surface, Park NX10 can initiate an automatic fast tip to sample approach within 10 seconds of cantilever loading. Fast feedback by the high speed Z scanner and low noise signal processing by the NX electronics controller enable quick engagement to the sample surface without any user intervention. It just works, minimal user involvement required.

Easy, Intuitive Laser Beam Alignment


With our advanced pre-aligned cantilever holder, the laser beam is focused on the cantilever upon placement. Furthermore, the natural on-axis top-down view, the only one in the industry, allows you to easily find the laser spot. Since the laser beam falls vertically on the cantilever, you can intuitively move the laser spot along the X- and Y-axis by rotating its two positioning knobs. As a result, you can easily find the laser and position it on PSPD using our beam alignment user interface. From there, all you will need is a minor adjustment to maximize the signal to start acquiring the data.



Park NX10 features


12D Flexure-Guided Scanner with 50 µm x 50 µm Scan Range

2D-Flexure-Guided-ScannerThe XY scanner consists of symmetrical 2-dimensional flexure and high-force piezoelectric stacks provides high orthogonal movement with minimal out-of-plane motion as well as high responsiveness essential for precise sample scanning in the nanometer scale.

2High Speed Z Scanner with 15 µm Scan Range

Driven by a high-force piezoelectric stack and guided by a flexure structure, the standard Z scanner has a high resonant frequency of more than 9 kHz (typically 10.5 kHz), and Z-servo speed of more than 48 mm/sec tip velocity which enables accurate feedback. The maximum Z scan range can be extended from 15µm to 30µm with the optional long scan range Z scanner.

3Low Noise XYZ Position Sensors

The industry leading low noise Z detector replaces the applied Z voltage as the Topography signal. In addition, the low noise XY closed loop scan minimizes the forward and backward scan gap to be less than 0.15% of the scan range.

4Motorized XY Sample Stage

XY Sample Stage is motorized to make it easy for navigating and positioning the sample to the region of interest. This motorized stage has a resolution of 0.6um (using micro-stepping) on both axis.

5Step Scan Automation

Using the motorized sample stage, Step-and-Scan enables user-programmable multiple region imaging. The Step-and-Scan process consists of:


1) Scan an image
2) Lift the cantilever
3) Move the motorized stage to a user defined coordinate
4) Approach
5) Repeat the scan

This automated feature increases productivity by minimizing user assistance during repetitive imaging processes.

6Accessible Sample Holder

The Park NX10’s unique head design handles up to 50 mm x 50 mm x 20 mm (width x length x height) sample size, and it allows easy side access to the sample and tip.

7Expansion Slot for Advanced SPM Modes and Options

Advanced SPM modes are enabled by simply plugging an option module to the expansion slot. The modular design of the NX-series AFM allows option compatibility throughout its product line.

8Direct On-Axis High Powered Optics with Integrated LED Illumination

Custom designed objective lens with ultra long working distance (51 mm, 0.21 NA, 1.0 µm resolution) provides direction on-axis optical view with unprecedented clarity. The intuitive direct on-axis sample view from the top allows users to navigate the sample surface easily to find the target area. For a higher vision resolution the EL20x objective lens of Long Travel Head is used, which has 20 mm working distance, 0.42 NA, and 0.7 µm resolution. The enlarged sensor size of the CCD provides wide field of view of the sample without compromising the optics resolution. The software-controlled LED light source provides ample illumination onto the sample surface for clear sample observation.

9Auto Engage by Slide-to-Connect SLD Head

The AFM head is easily inserted or removed by sliding it along a dovetail rail. This automatically locks the head into its pre-aligned position and connects it to the control electronics with a positioning repeatability of a few microns. The low coherency of the Super Luminescence Diode (SLD) enables accurate imaging of highly reflective surfaces and precise measurements for pico-Newton Force-distance spectroscopy. The SLD wavelength eliminates interference issues for users interested in combining the AFM with experiments in the visible spectrum.

10Vertically Aligned Motorized Z Stage and Focus Stage

The motorized Z stage and the motorized focus stage both make it possible of engaging the cantilever to the sample surface while constantly maintaining a clear vision for the user. And because the focus stage is motorized and software controlled, it has the precision necessary for transparent samples and liquid cell applications.

High Speed 24-bit Digital Electronics

All NX-series AFMs are controlled and processed by the same NX electronics controller. The controller is an all digital, 24-bit high speed electronics unit, which insures the speed and accuracy of Park’s True Non-Contact ModeTM for accuracy and speed. With its low noise design and high speed processing unit, the controller is ideal for nanoscale imaging and precise voltage and current measurements. The embedded digital signal processing capability adds to the functionality and economics of our AFM solutions for advanced researchers.

24-bit signal resolution for XY and Z detectors
• 0.003 nm resolution in XY (50 μm XY)
• 0.001 nm resolution in Z (15 μm Z)

Embedded digital signal processing capability
• 3 channels of flexible digital lock-ins
• Spring constant calibration (thermal method)
• Digital Q control included

Intergrated signal access ports
• Dedicated and programmable signal input/output ports
• 7 inputs and 3 outputs