Z Scanner

Guided high-force flexure scanner
Scan range : 15 µm (optional 30 µm)
Resolution : 0.015 nm
Position detector noise : 0.03 nm (bandwidth: 1 kHz)
Resonant frequency : > 9 kHz (typically 10.5 kHz)

XY Scanner

Single module flexure XY-scanner with closed-loop control
50 µm × 50 µm (optional 10 µm × 10 µm or 100 µm × 100 µm)
Resolution : 0.05 nm
Position detector noise : < 0.25 nm (bandwidth: 1 kHz)
Out-of-plane motion : < 2 nm (over 40 µm scan)

Stage

Z stage range : 25 mm
Focus travel range : 15 mm
XY stage travel range : 20 mm x 20 mm
Sample size : Open space up to 100 mm x 100 mm, thickness up to 20 mm
Sample weight : < 500 g

Vision

10x (0.21NA) ultra-long working distance lens (1µm resolution)
20x (0.42 NA) high-resolution, long working distance lens (0.6 µm resolution)
Direct on-axis vision of sample surface and cantilever
Field-of-view : 480 × 360 µm (with 10× objective lens)
CCD : 1 Mpixel, 5 Mpixel (optional)

Software

SmartScan™

Dedicated system control and data acquisition software
Adjusting feedback parameters in real time
Script-level control through external programs (optional)

XEI

AFM data analysis software

Electronics

Signal processing

ADC : 18 channels
4 high-speed ADC channels
24-bit ADCs for X, Y, and Z scanner position sensor
DAC : 12 channels
2 high-speed DAC channels
20-bit DACs for X, Y, and Z scanner positioning
Maximum data size : 4096 x 4096 pixels

Integrated functions

3 channels of flexible digital lock-in amplifier
Spring constant calibration (Thermal method, optional)
Digital Q control

External signal access

20 embedded signal input/output ports
5 TTL outputs : EOF, EOL, EOP, Modulation, and AC bias

Electrical Properties*

Conductive AFM
IV Spectroscopy
Kelvin Probe Force Microscopy (KPFM)
Scanning Capacitance Microscopy (SCM)
Scanning Spreading-Resistance Microscopy (SSRM)
Scanning Tunneling Microscopy (STM)
Scanning Tunneling Spectroscopy (STS)
Time-Resolved Photo Current Mapping (PCM)

Chemical Properties*

Chemical Force Microscopy with Functionalized Tip
Electrochemical Microscopy (EC-AFM)