Park NX10 Specifications
Z Scanner
Guided high-force flexure scanner
Scan range : 15 µm (optional 30 µm)
Resolution : 0.015 nm
Position detector noise : 0.03 nm (bandwidth: 1 kHz)
Resonant frequency : > 9 kHz (typically 10.5 kHz)
XY Scanner
Single module flexure XY-scanner with closed-loop control
50 µm × 50 µm (optional 10 µm × 10 µm or 100 µm × 100 µm)
Resolution : 0.05 nm
Position detector noise : < 0.25 nm (bandwidth: 1 kHz)
Out-of-plane motion : < 2 nm (over 40 µm scan)
Stage
Z stage range : 25 mm
Focus travel range : 15 mm
XY stage travel range : 20 mm x 20 mm
Sample size : Open space up to 100 mm x 100 mm, thickness up to 20 mm
Sample weight : < 500 g
Vision
10x (0.21NA) ultra-long working distance lens (1µm resolution)
20x (0.42 NA) high-resolution, long working distance lens (0.6 µm resolution)
Direct on-axis vision of sample surface and cantilever
Field-of-view : 480 × 360 µm (with 10× objective lens)
CCD : 1 Mpixel, 5 Mpixel (optional)
Software
SmartScan™
Dedicated system control and data acquisition software
Adjusting feedback parameters in real time
Script-level control through external programs (optional)
XEI
AFM data analysis software
Electronics
Signal processing
ADC : 18 channels
4 high-speed ADC channels
24-bit ADCs for X, Y, and Z scanner position sensor
DAC : 12 channels
2 high-speed DAC channels
20-bit DACs for X, Y, and Z scanner positioning
Maximum data size : 4096 x 4096 pixels
Integrated functions
3 channels of flexible digital lock-in amplifier
Spring constant calibration (Thermal method, optional)
Digital Q control
External signal access
20 embedded signal input/output ports
5 TTL outputs : EOF, EOL, EOP, Modulation, and AC bias
AFM Modes
(*Optionally available)
Standard Imaging
True Non-Contact AFM
PinPoint™ AFM
Basic Contact AFM
Lateral Force Microscopy (LFM)
Phase Imaging
Intermittent (tapping) AFM
Force Measurement*
Force Distance (FD) Spectroscopy
Force Volume Imaging
Dielectric/Piezoelectric Properties*
Electric Force Microscopy (EFM)
Dynamic Contact EFM (EFM-DC)
Piezoelectric Force Microscopy (PFM)
PFM with High Voltage
Mechanical Properties*
Force Modulation Microscopy (FMM)
Nanoindentation
Nanolithography
Nanolithography with High Voltage
Nanomanipulation
Piezoelectric Force Microscopy (PFM)
Magnetic Properties*
Magnetic Force Microscopy (MFM)
Tunable MFM
Electrical Properties*
Conductive AFM
IV Spectroscopy
Kelvin Probe Force Microscopy (KPFM)
Scanning Capacitance Microscopy (SCM)
Scanning Spreading-Resistance Microscopy (SSRM)
Scanning Tunneling Microscopy (STM)
Scanning Tunneling Spectroscopy (STS)
Time-Resolved Photo Current Mapping (PCM)
Chemical Properties*
Chemical Force Microscopy with Functionalized Tip
Electrochemical Microscopy (EC-AFM)
AFM Options
Temperature Control
Heating & Cooling Stage (-25ºC~180 ºC)
250 ºC Heating Stage
600 ºC Heating Stage
Liquid Cells
Universal Liquid Cell
Electrochemistry Cell
Open Liquid Cell
Liquid Probehand
Designed for imaging in general liquid environment
Resistant to most buffer solutions including acid
Contact and Non-contact AFM imaging in liquid
Clip-type Chip Carrier
Can be used with unmounted cantilever
Tip bias function available for Conductive AFM and EFM
Tip bias range : -10 V ~ 10 V
Magnetic Field Generator
Applies external magnetic field parallel to sample surface
Tunable magnetic field
Range : -300 ~ 300 gauss
Composed of pure iron core & two solenoid coils
Dimensions in mm

