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    AFM Specifications

Park NX10 Specifications

Z Scanner

Guided high-force flexure scanner
Scan range : 15 µm (optional 30 µm)
Resolution : 0.015 nm
Position detector noise : 0.03 nm (bandwidth: 1 kHz)
Resonant frequency : > 9 kHz (typically 10.5 kHz)


XY Scanner

Single module flexure XY-scanner with closed-loop control
50 µm × 50 µm (optional 10 µm × 10 µm or 100 µm × 100 µm)
Resolution : 0.05 nm
Position detector noise : < 0.25 nm (bandwidth: 1 kHz)
Out-of-plane motion : < 2 nm (over 40 µm scan)



Z stage range : 25 mm
Focus travel range : 15 mm
XY stage travel range : 20 mm x 20 mm
Sample size : Open space up to 100 mm x 100 mm, thickness up to 20 mm
Sample weight : < 500 g



10x (0.21NA) ultra-long working distance lens (1µm resolution)
20x (0.42 NA) high-resolution, long working distance lens (0.6 µm resolution)
Direct on-axis vision of sample surface and cantilever
Field-of-view : 480 × 360 µm (with 10× objective lens)
CCD : 1 Mpixel, 5 Mpixel (optional)




Dedicated system control and data acquisition software
Adjusting feedback parameters in real time
Script-level control through external programs (optional)


AFM data analysis software



Integrated functions

4 channels of flexible digital lock-in amplifier
Spring constant calibration (Thermal method, optional)
Digital Q control

External signal access

20 embedded signal input/output ports
5 TTL outputs : EOF, EOL, EOP, Modulation, and AC bias


AFM Modes
(*Optionally available)

Standard Imaging

True Non-Contact AFM
PinPoint™ AFM
Basic Contact AFM
Lateral Force Microscopy (LFM)
Phase Imaging
Intermittent (tapping) AFM

Force Measurement*

Force Distance (FD) Spectroscopy
Force Volume Imaging

Dielectric/Piezoelectric Properties*

Electric Force Microscopy (EFM)
Dynamic Contact EFM (EFM-DC)
Piezoelectric Force Microscopy (PFM)
PFM with High Voltage

Mechanical Properties*

Force Modulation Microscopy (FMM)
Nanolithography with High Voltage
Piezoelectric Force Microscopy (PFM)

Magnetic Properties*

Magnetic Force Microscopy (MFM)
Tunable MFM


Electrical Properties*

Conductive AFM
IV Spectroscopy
Kelvin Probe Force Microscopy (KPFM)
Scanning Capacitance Microscopy (SCM)
Scanning Spreading-Resistance Microscopy (SSRM)
Scanning Tunneling Microscopy (STM)
Time-Resolved Photo Current Mapping (PCM)

Chemical Properties*

Chemical Force Microscopy with Functionalized Tip
Electrochemical Microscopy (EC-AFM)


AFM Options

Temperature Control

Heating & Cooling Stage (-25ºC~180 ºC)
250 ºC Heating Stage
600 ºC Heating Stage

Liquid Cells

Universal Liquid Cell
Electrochemistry Cell
Open Liquid Cell

Liquid Probehand

Designed for imaging in general liquid environment
Resistant to most buffer solutions including acid
Contact and Non-contact AFM imaging in liquid

Clip-type Chip Carrier

Can be used with unmounted cantilever
Tip bias function available for Conductive AFM and EFM
Tip bias range : -10 V ~ 10 V

Magnetic Field Generator

Applies external magnetic field parallel to sample surface
Tunable magnetic field
Range : -300 ~ 300 gauss
Composed of pure iron core & two solenoid coils


Dimensions in mm

nx10 sys demensionnx10 ae demension

Park NX10 - Specifications | Park Atomic Force Microscope