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    AFM Specifications

Park NX20 Specification 

XY Scanner

Single-module flexure XY scanner with closed-loop control
Scan range : 100μm x 100μm
                    50μm x 50μm

                    25μm x 25μm

20-bit position control and 24-bit position sensor



XY travel range : 150 mm (200 mm optional)
Z travel range : 25 mm
Focus travel range: 15 mm
Precision encoder for all axes (optional)


Z Scanner

Guided high-force Z scanner
Scan range : 15 µm
                     30 µm
20-bit position control and 24-bit position sensor


Sample Mount

Up to 150 mm (200 mm optional)
Vacuum grooves to hold wafer samples



Objective lens

10× (0.21 NA) objective lens with ultra-long working distance
20× (0.42 NA) objective lens with long working distance and high resolution 

    Direct on-axis vision of sample surface and cantilever

    Coupled with 10× objective lens (20× optional)

     Field-of-view: 840 µm × 630 µm

 CCD: 5 MP 




Dedicated system control and data acquisition software
Adjusting feedback parameters in real time
Script-level control through external programs(optional)


AFM data analysis software



Signal processing

ADC : 18 channels
4 high-speed ADC channels
24-bit ADCs for X, Y, and Z scanner position sensor
DAC : 17 channels
2 high-speed DAC channels
20-bit DACs for X,Y and Z scanner positioning
Maximum data size : 4096 x 4096 pixels

Integrated functions

3 channels of flexible digital lock-in amplifier
Digital Q control

External signal access

20 embedded signal input/output ports

outputs : EOF, EOL, EOP,Modulationand AC bias


AFM Mode
(*Optionally available)

Standard Imaging

True Non-Contact Mode
PinPoint™ AFM
Basic Contact AFM
Lateral Force Microscopy (LFM)
Phase Imaging
Intermittent (tapping) AFM

Electrical Characterization*

Scanning Capacitance Microscopy (SCM)
Conductive AFM
Electric Force Microscopy (EFM)
Piezoresponse Force Microscopy (PFM)
Kelvin Probe Microscopy (KPFM)

General Characterization*

Magnetic Force Microscopy(MFM)
Scanning Thermal Microscopy(SThM)
F-D Spectroscopy
Scanning Tunneling Microscopy(STM)
Force Modulation Microscopy(FMM)



Customize your AFM to handle any project

Automatic data collection and analysis lets you save time


The NX20 features Park's automation control software that automatically carries out AFM measurements of a sample according to your preset procedure (recipe). It can accurately collect data, perform pattern recognition, and do analysis using its onboard Cognex board and optics module, and export with almost no user in put so you have more time to do innovative research.

Sample Tilting Stage for Sidewall Imaging lets you see more


The NX20’s innovative architecture lets you detect the sidewall and surface of the sample, and measure their angle. This gives the unit the versatility you need to do more innovative research and gain deeper insights.


Active Temperature Controlled Acoustic Enclosure

Innovative control design allows Park NX20 to quickly reach temperature equilibrium
Innovative control design allows Park NX20 to quickly reach temperature equilibrium
Park NX20 also features active vibration isolation.

Encoders for Motorized Stage

• The encoded XY stage travels in 1 µm resolution with 2 µm repeatability

• The encoded Z stage travels in 0.1 µm resolution with 1 µm repeatability

Sample Plates

• Dedicated small sample holder for electrical measurements

• Vacuum grooves to hold wafers

• Sample dimension: Up to 200 mm (150 mm default)

Cliptype Chip Carrier

• Can be used with an unmounted cantilever

• Tip bias function available for Conductive AFM and EFM

• Tip bias range: -10 V ~ +10 V

Precise Temperature Control

• Heating & Cooling Stage (0~180 ºC)

• 250 ºC Heating Stage

• 600 ºC Heating Stage


Dimensions in mm


Park NX20 - Specifications | Park Atomic Force Microscope