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  • Park
    NX20 Lite
    Atomic Force Microscope
    The most affordable AFM system
    for wafer measurement and analysis
    with latest NX performance

Increase your productivity with our powerfully versatile AFM

The Park NX20 Lite includes many unique capabilities that make it ideal for shared labs that handle a diverse range of samples, researchers doing multi variant experiments, and failure analysis engineers working on wafers. Its reasonable price and robust feature set also make it one of the best value large-sample AFMs in the industry.


The Most Convenient Sample Measurements with MultiSample Scan

  • Automated imaging of multiple samples in one pass
  • Specially designed multi-sample chuck for the loading of up to 16 individual samples (optionally available)
  • Fully motorized XY sample stage travels up to 150 mm x 150 mm

Accurate XY Scan by Crosstalk Elimination

  • Two independent, closed-loop XY and Z flexure scanners
  • Flat and orthogonal XY scan with low residual bow
  • More accurate height measurements enabled by NX electronic controller without any need for software processing

Best Tip Life, Resolution and Sample Preservation by True Non-Contact™ Mode

  • Fast Z-servo speed enabling True Non-Contact™ Mode
  • Minimum tip wear for prolonged high-quality and high-resolution imaging

Versatile Range of Modes and Options

  • Comprehensive set of measurement modes and characterizations
  • Expanded capabilities with optional accessories and upgrades
  • Advanced electrical measurements for failure analysis (FA)