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    NX20 300mm
    Atomic Force Microscope
    The leading automated nanometrology tool for
    300 mm wafer measurement and analysis

Park NX20 300mm

The leading automated nanometrology tool for
300 mm wafer measurement and analysis

The Park NX20 300mm is the industry's first large sample AFM that supports a full motorized traveling range of 300 mm x 300 mm. Designed for failure analysis and quality control laboratories, the new upgraded Park NX20 system can inspect an entire 300 mm wafer efficiently, without any need for cumbersome sample displacement. Despite the enlarged platform to support the 300 mm motorized XY stage, Park's innovative vibration isolation technology keeps the system noise level below 0.5 angstrom (Å) RMS or typically 0.3 Å RMS

in the field. Proven AFM performance and SingleClick-AFM automation eliminates any need for sample adjustment and makesof Park NX20 the scanning process as efficient and user-friendly as possible. With our "Program Mode" interface users can easily implement reliable and repeatable sequential multiple-site measurements over the entire 300mm x 300mm area. This makes the NX20 300 mm the premiere choice for FA, QA, and QC engineers that need to scan large samples.

Brochures

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Specifically Built for Large Sample Wafer Inspection

The NX20 300 mm was designed from the ground up to allow for optimal measurements of large samples. The entire 300 mm wafer area can be analyzed for low-noise AFM measurements. This opens up a whole new scope of measurement automation, allowing engineers to work faster, more simply, and with greater precision.

 

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Flexible 300 mm Sample Chuck

The Park NX20 300 mm’s vacuum chuck supports a wide range of wafer sizes, shapes, and types allowing users to accurately scan practically any sample.

 

300 mm XY stage

The motorized 300 mm XY stage allows users to move the AFM measuring position within the entire 300 mm area.

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Proven NX20 Performance with a 300 mm sample stage

The NX20 is already the best choice for FA, QA, and QC engineers that need its unparalleled ease of use and automation without compromising on accuracy. With its enlarged platform that supports a 300mm motorized XY stage, the NX20 300 mm takes this a step further, allowing users to inspect larger samples easily and with extremely high accuracy.

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Park SmartScan™ makes getting accurate measurements simple

The Park NX20 is equipped with our SmartScan OS, making it one of the easiest to use AFMs on the market. With an intuitive but extremely powerful interface, even untrained users can quickly scan a large sample without supervision. This lets senior engineers focus their experience on solving bigger problems and developing better solutions.

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aScan multiple sites on the entire 300 mm wafer

SmartScan’s program mode allows users to take automated sequential site measurements, compare surface morphologies, height, surface roughness from site-to-site and sample-to-sample using grid and wafer based modes. This can greatly improve user-convenience and productivity when scanning large samples.

bPowerful recipe creation

Our simple recipe creation process allows engineers to set presets defined by location, name, number and type on each batch.

 

Optimized for a Wide Range of Applications

The NX20 300mm provides recipe-automated AFM measurement for numerous applications providing advanced measurements and analysis of samples at the nanoscale. With the ability to measure roughness, height and depth, perform defect reviews, electrical and magnetic failure analyses, thermal property characterization, and nanomechanical property imaging, the AFM is ideally suited to a wide range of tasks performed by FA, QA, and QC engineers that work with large samples.

 

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Park NX20 300mm Specifications

Scanner

Z Scanner

Guided high-force flexure scanner

Scan range : 15 µm (optional 30 µm)
Height noise level : 30 pm
(RMS, at 0.5 kHz bandwidth)

XY Scanner

Single module flexure XY-scanner with dual servo closed-loop control

Scan range : 100 µm × 100 µm

 

Stage

Z stage range : 25 mm (Motorized)
Focus travel range : 8 mm (Motorized)
XY stage travel range : 300 mm x 300 mm (Motorized)

 

Sample Mount

Sample size : 100, 150, 200, 300 mm wafers, small sample Magnetic sample holder, thickness up to 20 mm
Sample weight : < 500 g

 

Optics

10x (0.23 NA) ultra-long working distance lens (1 µm resolution)
Direct on-axis vision of sample surface and cantilever
Field-of-view : 840 × 630 µm (with 10× objective lens)
CCD : 5 M pixel

 

Software

SmartScan™

Dedicated system control and data acquisition software
Auto mode, Manual mode
Program mode for recipe-automated, sequential multiple-site measurement AFM operation

XEI

AFM data analysis software

 

Electronics

Integrated functions
4 channels of flexible digital lock-in amplifier
Digital Q control


Signal processing
  • ADC : 18 channels 4 high-speed ADC channels 24-bit ADCs for X, Y and Z scanner position sensor
  • DAC : 17 channels 2 high-speed DAC channels 20-bit DACs for X, Y and Z scanner positioning
  • Maximum data size : 4096 x 4096 pixels

External signal access
20 embedded signal input/output ports
5 TTL outputs : EOF, EOL, EOP, Modulation, and AC bias
 

AFM Modes
(*Optionally available)

Standard Imaging

True Non-Contact AFM
PinPoint™ AFM
Basic Contact AFM
Lateral Force Microscopy (LFM)
Phase Imaging
Tapping AFM

Force Measurement

Force Distance (F/d) Spectroscopy
Force Volume Imaging

Dielectric/Piezoelectric Properties

Electric Force Microscopy (EFM)
Dynamic Contact EFM (EFM-DC)
Piezoresponse Force Microscopy (PFM)
PFM with High Voltage*

Mechanical Properties

Force Modulation Microscopy (FMM)
Nanoindentation*
Nanolithography*
Nanolithography with High Voltage*
Nanomanipulation*

Magnetic Properties*

Magnetic Force Microscopy (MFM)
Tunable Magnetic Field MFM

 

Electrical Properties

Conductive AFM (C-AFM)*
IV Spectroscopy*
Kelvin Probe Force Microscopy (KPFM)
Scanning Capacitance Microscopy (SCM)*
Scanning Spreading-Resistance Microscopy (SSRM)*
Scanning Tunneling Microscopy (STM)*
Photo Current Mapping (PCM)*

Chemical Properties*

Chemical Force Microscopy with Functionalized Tip
Electrochemical Microscopy (EC-AFM)

 

AFM Options

Customize your AFM to handle any project

Active Temperature Controlled Acoustic Enclosure

Innovative control design allows Park NX20 300mm to quickly reach temperature equilibrium Park NX20 300mm also features active vibration isolation.

Active Temperature Controlled Acoustic Enclosure

Innovative control design allows Park NX20 300mm to quickly reach temperature equilibrium Park NX20 300mm also features active vibration isolation.


Encoders for Motorized Stage

• The encoded XY stage travels in 1 µm resolution with 2 µm repeatability
• The encoded Z stage travels in 0.1 µm resolution with 1 µm repeatability

Sample Plates

• Dedicated small sample holder for electrical measurements
• Vacuum grooves to hold wafers



Temperature Control

· Temperature Controlled Stage 1:  -25 °C to +170 °C
· Temperature Controlled Stage 2:  Ambient to +250 °C
· Temperature Controlled Stage 3:  Ambient to +600 °C


Park NX20 300 mm | Park Atomic Force Microscope