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Defects of Reflex lens

Defects of Reflex lens 2

Scanning Conditions

- System: NX10
- Scan Mode: Non-contact
- Cantilever: AC160TS (k=26N/m, f=300kHz)
- Scan Size: 10μm×10μm
- Scan Rate: 0.5Hz
- Pixel: 512×512