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CMP test key
Scanning Conditions
- System : NX20
- Scan Mode: Non-contact
- Scan Rate : 1Hz for 25μm2 / 0.6HZ for 15μm2
- Scan Size : 25μm2, 15μm2
- Pixel Size : 512×256 for 25μm2 / 1025×128 for 15μm2
- Cantilever : PPP-NCHR (k=42N/m, f=330kHz)