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Trench Etch Profile on MESA
Top dielectric trench etch profile on MESA on Si wafer.
Scanning Conditions
- System: NX20
- Scan Mode: Non-contact
- Cantilever: AR5T-NCHR (k=42N/m, f=300kHz)
- Scan Size: 6μm×6μm
- Scan Rate: 0.12Hz
- Pixel Size: 1024 × 256
- Scan Mode: Non-contact
- Cantilever: AR5T-NCHR (k=42N/m, f=300kHz)
- Scan Size: 6μm×6μm
- Scan Rate: 0.12Hz
- Pixel Size: 1024 × 256