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    AFM Specifications

Park NX10 Specifications


Z Scanner

Guided high-force flexure scanner

Scan range : 15 µm (optional 30 µm)
Height noise level : 30 pm
(RMS, at 0.5 kHz bandwidth)

XY Scanner

Single module flexure XY-scanner with closed-loop control

Scan range : 50 µm × 50 µm
(optional 10 µm × 10 µm or 100 µm × 100 µm)



Z stage range : 25 mm (Motorized)
Focus travel range : 15 mm (Motorized)
XY stage travel range : 20 mm x 20 mm (Motorized)


Sample Mount

Sample size : Open space up to 100 mm x 100 mm, thickness up to 20 mm
Sample weight : < 500 g



10x (0.23 N.A.) ultra-long working distance lens (1µm resolution)
Direct on-axis vision of sample surface and cantilever
Field-of-view : 480 × 360 µm (with 10× objective lens)
CCD : 1 M pixel, 5 M pixel (optional)




Dedicated system control and data acquisition software
Adjusting feedback parameters in real time
Script-level control through external programs (optional)


AFM data analysis software



Integrated functions

4 channels of flexible digital lock-in amplifier
Spring constant calibration (Thermal method, optional)
Digital Q control

External signal access

20 embedded signal input/output ports
5 TTL outputs : EOF, EOL, EOP, Modulation, and AC bias


AFM Modes
(*Optionally available)

Standard Imaging

True Non-Contact AFM
PinPoint™ AFM
Basic Contact AFM
Lateral Force Microscopy (LFM)
Phase Imaging
Tapping AFM

Force Measurement

Force Distance (F/d) Spectroscopy
Force Volume Imaging

Dielectric/Piezoelectric Properties

Electric Force Microscopy (EFM)
Dynamic Contact EFM (EFM-DC)
Piezoresponse Force Microscopy (PFM)
PFM with High Voltage*

Mechanical Properties

Force Modulation Microscopy (FMM)
Nanolithography with High Voltage*

Magnetic Properties*

Magnetic Force Microscopy (MFM)
Tunable Magnetic Field MFM


Electrical Properties

Conductive AFM (C-AFM)*
IV Spectroscopy*
Kelvin Probe Force Microscopy (KPFM)
Scanning Capacitance Microscopy (SCM)*
Scanning Spreading-Resistance Microscopy (SSRM)*
Scanning Tunneling Microscopy (STM)*
Photo Current Mapping (PCM)*

Chemical Properties*

Chemical Force Microscopy with Functionalized Tip
Electrochemical Microscopy (EC-AFM)


AFM Options

Temperature Control

Temperature Controlled Stage 1
  -25 °C to +170 °C
Temperature Controlled Stage 2
  Ambient to +250 °C
Temperature Controlled Stage 3
  Ambient to +600 °C

Liquid Cells

Universal Liquid Cell
Open or closed liquid cell with liquid/gas perfusion
Temperature control range : 0 °C to +110 °C (in air), 4 °C to +70 °C (with liquid)
Electrochemistry Cell
Open Liquid Cell

Liquid Probehand

Designed for imaging in general liquid environment
Resistant to most buffer solutions including acid
Contact and Non-contact AFM imaging in liquid

Magnetic Field Generator

Applies external magnetic field parallel to sample surface
Tunable magnetic field
Range : -300 ~ 300 gauss
Composed of pure iron core & two solenoid coils


Dimensions in mm

nx10 sys demensionnx10 ae demension