Park NX10 Specifications
Scanner
Z Scanner
Guided high-force flexure scanner
Scan range : 15 µm (optional 30 µm)
Height noise level : 30 pm
0.5 kHz bandwidth, rms (typical)
XY Scanner
Single module flexure XY-scanner with closed-loop control
Scan range : 50 µm × 50 µm
(optional 10 µm × 10 µm or 100 µm × 100 µm)
Stage
Z stage range : 25 mm (Motorized)
Focus travel range : 15 mm (Motorized)
XY stage travel range : 20 mm x 20 mm (Motorized)
Sample Mount
Sample size : Open space up to 100 mm x 100 mm, thickness up to 20 mm
Sample weight : < 500 g
Optics
10x (0.23 N.A.) ultra-long working distance lens (1µm resolution)
Direct on-axis vision of sample surface and cantilever
Field-of-view : 480 × 360 µm (with 10× objective lens)
CCD : 1 M pixel, 5 M pixel (optional)
Software
SmartScan™
Dedicated system control and data acquisition software
Adjusting feedback parameters in real time
Script-level control through external programs (optional)
XEI
AFM data analysis software
Electronics
Integrated functions
4 channels of flexible digital lock-in amplifier
Spring constant calibration (Thermal method, optional)
Digital Q control
External signal access
20 embedded signal input/output ports
5 TTL outputs : EOF, EOL, EOP, Modulation, and AC bias
AFM Modes
(*Optionally available)
Standard Imaging
True Non-Contact AFM
PinPoint™ AFM
Basic Contact AFM
Lateral Force Microscopy (LFM)
Phase Imaging
Tapping AFM
Force Measurement
Force Distance (F/d) Spectroscopy
Force Volume Imaging
Dielectric/Piezoelectric Properties
Electric Force Microscopy (EFM)
Dynamic Contact EFM (EFM-DC)
Piezoresponse Force Microscopy (PFM)
PFM with High Voltage*
Mechanical Properties
Force Modulation Microscopy (FMM)
Nanoindentation*
Nanolithography*
Nanolithography with High Voltage*
Nanomanipulation*
Magnetic Properties*
Magnetic Force Microscopy (MFM)
Tunable Magnetic Field MFM
Electrical Properties
Conductive AFM (C-AFM)*
IV Spectroscopy*
Kelvin Probe Force Microscopy (KPFM)
Scanning Capacitance Microscopy (SCM)*
Scanning Spreading-Resistance Microscopy (SSRM)*
Scanning Tunneling Microscopy (STM)*
Photo Current Mapping (PCM)*
Chemical Properties*
Chemical Force Microscopy with Functionalized Tip
Electrochemical Microscopy (EC-AFM)
AFM Options
Temperature Control
Temperature Controlled Stage 1
-25 °C to +170 °C
Temperature Controlled Stage 2
Ambient to +250 °C
Temperature Controlled Stage 3
Ambient to +600 °C
Liquid Cells
Universal Liquid Cell
Open or closed liquid cell with liquid/gas perfusion
Temperature control range : 0 °C to +110 °C (in air), 4 °C to +70 °C (with liquid)
Electrochemistry Cell
Open Liquid Cell
Liquid Probehand
Resistant to most buffer solutions including acid
Contact and Non-contact AFM imaging in liquid
Magnetic Field Generator
Applies external magnetic field parallel to sample surface
Tunable magnetic field
Range : -300 ~ 300 gauss
Composed of pure iron core & two solenoid coils
Dimensions in mm
