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Tip Shape Checker (TSC-200)
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Option Description
The tip shape checker, TSC-200 is a reference material to check the overall shape of the AFM tip. If the certified linewidth (WC) is subtracted from the AFM line profile, the shape of the tip can be determined.
Specifications
- Line width (WC): 200 nm
- Reference pitch (PR): 600 nm
- Trench width: 400 nm
- Pattern depth (D): 1,000 nm (Not certified)
- Pattern size: 4 mm × 1.3 mm (Certified area 3 mm)
- Substrate: Rectangular coupon (9 × 18 mm)
- Traceability: KOLAS (KRISS) traceable via ISO 17034:2016
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