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EFM Characterizer (EFM-100)
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Option Description
The EFM characterizer, EFM-100 is a standard to measure the electrostatic force between the charged AFM tip and the sample surface.
Specifications
- Pitch: 6 μm
- Line width: 2.5 μm
- Step height: 20 nm
- Electrode material: Cr / Au
- Substrate: Circular coupon (Ф 20 mm)
- Traceability: Not certified
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