Park FX300 IR
The most advanced 300 mm AFM with IR spectroscopy
Park Systems FX300 IR large-sample atomic force microscope front view accommodating 300 mm wafer
Key Features
FX300 IR AFM-IR spectroscopy head adjacent to sample for nanoscale chemical imaging
FX300 IR AFM-IR spectroscopy head adjacent to sample for nanoscale chemical imaging
Park FX300 IR is Park Systems’ advanced AFM solution for nanoscale infrared spectroscopy and imaging, combining chemical and surface characterization. It is built on the proven FX300 platform supporting samples up to 300 mm, with low noise, minimal thermal drift, and high mechanical stability, ensuring reliable high-resolution metrology.

FX300 IR supports Photo-induced Force Microscopy (PiFM), enabling both IR spectral analysis and chemical imaging at the nanoscale. Like all Park AFMs, it features an orthogonal scan system and True Non-contact™ mode, delivering consistent, non-invasive measurements even on fragile samples.

Automation features such as automatic probe exchange, IR beam alignment, a full 300 mm sample-view camera, and multi-point measurement streamline operation and simplify workflows.

By combining high-performance AFM with advanced IR capability, FX300 IR provides a powerful platform for precise and efficient nanoscale chemical characterization.
Reliable Nano-IR Analysis
Park Advanced AFM Technology
Photo-induced Force Microscopy
Photo-induced Force Microscopy (PiFM) detects photo-induced forces generated by resonant molecular vibrations excited with a tunable IR laser. In Park FX300 IR, the AFM cantilever operates in Non-contact™ mode to measure local IR absorption without touching the sample, enabling spectral and chemical mapping with sub-5 nm spatial resolution and monolayer sensitivity.
Applications
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