Park Nanostandard
Z Scale Calibrator (ZSC12-200)
Option Description
ZSC12-200 sample consists of 200 nm step height uniform bar (10 μm, 50 μm wide). (Certified) This sample is designed for Z calibration.
Specifications
- Line widths: 10 / 50 μm
- Step height: 200 nm
- Chip size: 5 mm × 5 mm
- Pattern size: 1 mm × 1 mm
- Material: SiO₂ on Si
- Substrate: 300 mm wafer / 200 mm wafer (ZSC08-200)
- Traceability: KOLAS (KRISS) traceable via ISO 17034:2016
Explore Other AFM Options
Step Height Reference (SHR-100)
XYZ Scale Calibrator (XSC12-100)
AFM Tip Characterizer (AFMTC)