Park Nanostandard
XYZ Scale Calibrator (XSC12-100)
Option Description
XSC12-100 sample consists of multiple pitches (3 μm, 5 μm, 10 μm, 20 μm) and 100 nm height. (Certified) This sample is designed for XY and Z calibration.
Specifications
- Pitch values: 3 / 5 / 10 / 20 μm
- Step height: 100 nm
- Chip size: 5 mm × 5 mm
- Eatch pattern size: 1 mm × 1 mm
- Material: SiO₂ on Si
- Substrate: 300 mm wafer / 200 mm wafer (XSC08-100)
- Traceability: KOLAS (KRISS) traceable via ISO 17034:2016
Explore Other AFM Options
Step Height Reference (SHR-100)
Z Scale Calibrator (ZSC12-200)
AFM Tip Characterizer (AFMTC)