Full-automation AFM in-line capabilities with the NX-Wafer - May, 6, 2020

In this LIVE DEMO on the NX-Wafer Automated AFM we will introduce you to the inline metrology capabilities which are needed for full-automatic quality control. As a follow up to the previous live demo on the NX20 large sample AFM, we will introduce you to the soft- and hardware additions in the world of automation to run the tool 24/7. Features such as automatic wafer-handling and automatic tip exchange are necessary to control the tool completely remote. Automatic data acquisition and analysis of roughness, trench width, depth, and angle measurements are some of the most common applications, but only a fraction of the various analysis possibilities. With the #1 choice of AFM’s in the market you can be sure to find the perfect metrology solution for quantitative nano- to sub-nanoscale process inspection. This LIVE DEMO will give you a solid overview of the high productivity and powerful features for inline wafer-fab metrology provided by NX-Wafer.