MEMS Accelerometer and Gyroscope
For complex MEMS geometries, DHM outperforms traditional vibrometry by enabling instant, full-field vibration analysis at the sub-micron level, capturing intricate mode shapes in a single shot.
Measurement Conditions
- System: Lyncée R
- Objective Lens: 2.5×
- Mode: Stroboscopic mode
*Image contribution: Shanghai Jiaotong University, China
Application
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