Mask repair
Scanning Conditions
- System: NX-Mask
- Scan Mode: True Non-Contact™ Mode
- Scan Rate: All 0.5 Hz
- Scan Size: All 1.8 µm×1.8 µm
- Pixel Size: All 512×128
- Cantilever: AD-40-AS (k=40 N/m, f=200 kHz)
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