DRAM test sample with 68 nm channel

 

Scanning Conditions

- System: NX-Hivac
- Sample Bias: 1 V
- Scan Mode: Scanning Spreading Resistance Microscopy (SSRM)
- Scan Rate: 2 Hz
- Scan Size: 250 nm×250 nm
- Pixel Size: 128×128
- Cantilever: CDT-NCHR (k=72 N/m, f=210 kHz)

Application

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Related Modes

Scanning Spreading Resistance Microscopy (SSRM)

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