MoSi₂ Hard defect repair
Scanning Conditions
- System : NX-Mask
- Scan Mode: Non-contact for imaging Sweep for repairing
- Scan Rate : 0.3 Hz
- Scan Size : 6μm, 0.5μm×1μm
- Pixel Size : 512×64 for 6μm2, 512×34 for 0.5μm×1μm
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