LiNbO₃ wafer

LiNbO3 wafer 2

Scanning Conditions

- System: NX10
- Scan Mode: Non-contact
- Cantilever: AC55TS (k=85N/m, f=1600kHz)
- Scan Size:20μm×20μm, 2.5μm×2.5μm
- Scan Rate: 5Hz, 10Hz
- Pixel: 512×512, 256×256

Application

Semiconductor

Related Modes

True Non-Contact™ Mode

Related Contents

Sample Images

Defect on PR Patterns
Sample Images

300 mm Wafer Edge
Sample Images

Trench Etch Profile on MESA
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