AR/VR Optics Display Structure
Conventional SEM/TEM cross-sectioning is destructive, and conventional AFM is limited by tip geometry, making steep or undercut sidewalls difficult to measure accurately.
NX-3DM tilts the AFM head to capture true 3D sidewall topography, enabling precise measurement of steep and even undercut angles non-destructively.
Scan Conditions
- System: NX-3DM
- Scan Mode: Non-contact
- Scan Size: 4.5 µm×4.5 µm
- Scan Rate: 0.03 Hz
- Pixels: 2048×512
- Cantilever: EBD2-R2-NCLR (k=45 N/m, f=190 kHz)
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