The quickest path to innovative research
Park NX10 produces data you can trust, replicate, and publish at the highest nano resolution. From sample setting to full scan imaging, measurement, and analysis, Park NX10 saves you time every step of the way. With more time and better data, you can focus on doing more innovative research.
Imaging Modes
Park offers some of the most innovative imaging modes and technology. Our True Non-Contact mode is the world’s only truly non-contact AFM scanning mode while our standard scanning mode is among the most accurate available.
Electrical Modes
For engineers and researchers that need accurate data on conductance, sample resistance, and other electrical and topographic properties, Park offers a range of electrical scanning modes.
Nanomechanical Modes
Easily measure the mechanical properties of your sample using our set of mechanical scanning modes. Each features
Park System’s trademark accuracy so you always know
you’re collecting data you can rely on.
Special Modes
Park offers some of the most innovative imaging modes and technology. Our True Non-Contact mode is the world’s only truly non-contact AFM scanning mode while our standard scanning mode is among the most accurate available.
Accurate AFM Solutions for General Research
Tall Sample 1.5 µm step height
- Scan Mode: Non-contact mode, Topography from Z position sensor
Flat Sample Atomic steps of sapphire wafer
- 0.3 nm step height, Scan Mode: Non-contact mode, Topography from Z position sensor
Hard Sample Tungsten film
- Scan Mode: Non-contact mode, Topography from Z position sensor
Soft Sample Collagen fibril
- Scan Mode: Non-contact mode, Topography from Z position sensor
Accurate AFM Measurement with Low Noise Z Detector
Low Noise Z Detector of Park NX10 AFM
- Key technological advance and design feature of NX platform
- Noise level is the lowest in the industry, unmatched by any other
- Used as the default topography signal
The Z detector is the key technological advance of the new NX-series AFM. It is a new type of strain gauge sensor, innovated by Park. At 0.2 Angstrom, it is the best Z-detector noise in the industry. The noise level is low enough for Z-detector to be used as the default topography signal. If we compare the new NX-series AFM with previous generation of our AFM model, XE, one can tell the difference. If the Z-detector noise is too high, one cannot clearly observe the atomic steps on sapphire wafer. The height signal from the Z detector of the Park NX AFM has the noise level, identical to that of the Z-voltage-based topography.
Park NX Series
The noise level of the Z position detectors of the Park NXPark XE Series
The noise level of the Z position detectors of the Park XEAccurate AFM Scan by True Non-Contact™ Mode
True Non-Contact™ Mode
- Less tip wear = Prolonged high-resolution scan
- Non-destructive tip-sample interaction = Minimized sample modification
- Immunity from parameter dependent results
Tapping Imaging
- Quick tip wear = Blurred low-resolution scan
- Destructive tip-sample interaction = Sample damage and modification
- Highly parameter-dependent
The Best User Convenience by Design
Easy Tip and Sample Exchange
The unique head design allows easy side access allowing you to easily snap new tips and samples into place by hand. The cantilever is ready for scanning without the need for any tricky laser beam alignment by using pre-aligned cantilevers mounted on to the cantilever tip holder.
Lightning Fast Automatic Tip Approach
Our automatic tip to sample approach requires no user intervention and engages in just 10 seconds after loading the cantilever. By monitoring the cantilever response to the approaching surface, Park NX10 can initiate an automatic fast tip to sample approach within 10 seconds of cantilever loading. Fast feedback by the high speed Z scanner and low noise signal processing by the NX electronics controller enable quick engagement to the sample surface without any user intervention. It just works, minimal user involvement required.
Easy, Intuitive Laser Beam Alignment
With our advanced pre-aligned cantilever holder, the laser beam is focused on the cantilever upon placement. Furthermore, the natural on-axis top-down view, the only one in the industry, allows you to easily find the laser spot. Since the laser beam falls vertically on the cantilever, you can intuitively move the laser spot along the X- and Y-axis by rotating its two positioning knobs. As a result, you can easily find the laser and position it on PSPD using our beam alignment user interface. From there, all you will need is a minor adjustment to maximize the signal to start acquiring the data.
Park NX10 features
The XY scanner consists of symmetrical 2-dimensional flexure and high-force piezoelectric stacks provides high orthogonal movement with minimal out-of-plane motion as well as high responsiveness essential for precise sample scanning in the nanometer scale.
Driven by a high-force piezoelectric stack and guided by a flexure structure, the standard Z scanner has a high resonant frequency of more than 9 kHz (typically 10.5 kHz), and Z-servo speed of more than 48 mm/sec tip velocity which enables accurate feedback. The maximum Z scan range can be extended from 15µm to 30µm with the optional long scan range Z scanner.
The industry leading low noise Z detector replaces the applied Z voltage as the Topography signal. In addition, the low noise XY closed loop scan minimizes the forward and backward scan gap to be less than 0.15% of the scan range.
XY Sample Stage is motorized to make it easy for navigating and positioning the sample to the region of interest. This motorized stage has a resolution of 0.6um (using micro-stepping) on both axis.
Using the motorized sample stage, Step-and-Scan enables user-programmable multiple region imaging. The Step-and-Scan process consists of:
1) Scan an image
2) Lift the cantilever
3) Move the motorized stage to a user defined coordinate
4)
Approach
5) Repeat the scan
This automated feature increases productivity by minimizing user assistance during repetitive imaging processes.
The Park NX10’s unique head design handles up to 50 mm x 50 mm x 20 mm (width x length x height) sample size, and it allows easy side access to the sample and tip.
Advanced SPM modes are enabled by simply plugging an option module to the expansion slot. The modular design of the NX-series AFM allows option compatibility throughout its product line.
Custom designed objective lens with ultra long working distance (51 mm, 0.21 NA, 1.0 µm resolution) provides direction on-axis optical view with unprecedented clarity. The intuitive direct on-axis sample view from the top allows users to navigate the sample surface easily to find the target area. For a higher vision resolution the EL20x objective lens of Long Travel Head is used, which has 20 mm working distance, 0.42 NA, and 0.7 µm resolution. The enlarged sensor size of the CCD provides wide field of view of the sample without compromising the optics resolution. The software-controlled LED light source provides ample illumination onto the sample surface for clear sample observation.
The AFM head is easily inserted or removed by sliding it along a dovetail rail. This automatically locks the head into its pre-aligned position and connects it to the control electronics with a positioning repeatability of a few microns. The low coherency of the Super Luminescence Diode (SLD) enables accurate imaging of highly reflective surfaces and precise measurements for pico-Newton Force-distance spectroscopy. The SLD wavelength eliminates interference issues for users interested in combining the AFM with experiments in the visible spectrum.
The motorized Z stage and the motorized focus stage both make it possible of engaging the cantilever to the sample surface while constantly maintaining a clear vision for the user. And because the focus stage is motorized and software controlled, it has the precision necessary for transparent samples and liquid cell applications.
All NX-series AFMs are controlled and processed by the same NX electronics controller. The controller is an all digital, 24-bit high speed electronics unit, which insures the speed and accuracy of Park’s True Non-Contact ModeTM for accuracy and speed. With its low noise design and high speed processing unit, the controller is ideal for nanoscale imaging and precise voltage and current measurements. The embedded digital signal processing capability adds to the functionality and economics of our AFM solutions for advanced researchers.
24-bit signal resolution for XY and Z detectors
• 0.003 nm resolution in XY (50 μm XY)
•
0.001 nm resolution in Z (15 μm Z)
Embedded digital signal processing capability
• 3 channels of flexible digital lock-ins
• Spring constant calibration (thermal method)
• Digital Q control included
Intergrated signal access ports
• Dedicated and programmable signal input/output ports
•
7 inputs and 3 outputs
Park NX10 Specifications
Scanner
Z Scanner
AFM Head
Flexure guided high-force scanner
Scan range: 15 µm (optional 30 µm)
SICM Head
Flexure-guided structure driven by
multiply-stacked piezoelectric stacks
Scan range: 15 µm (optional 30 µm)
XY Scanner
Single module flexure XY-scanner with closed-loop control
Scan range : 50 µm × 50 µm
(optional 10 µm × 10 µm or 100 µm × 100 µm)
Stage
XY stage travel range: 20 mm x 20 mm (Motorized)
Z stage travel range: 25 mm (Motorized)
Focus stage travel range: 15 mm (Motorized)
Sample Mount
Sample size : Open space up to 100 mm x 100 mm, thickness up to 20 mm
On-Axis Optics
10x (0.21 N.A.) ultra-long working distance lens (1µm resolution)
Direct on-axis vision of sample surface and cantilever
Field-of-view : 480 × 360 µm (with 10× objective lens)
CCD : 1.2 M pixel, 5 M pixel (optional)
(optional; Field-of-view: 840 µm x 630 µm)
Software
SmartScan™
• AFM system control and data acquisition software
• Auto mode for quick setup and easy imaging
• Manual mode for advanced use and finer scan control
SmartAnalysis™
• AFM data analysis software
• Stand-alone design—can install and analyze data away from AFM
• Capable of producing 3D renders of acquired data
Electronics
Integrated functions
4 channels of flexible digital lock-in amplifier
Spring constant calibration (Thermal method)
Digital Q control
Options/Modes
Standard Imaging
True Non-Contact
Contact
Tapping
PinPoint™ AFM
Lateral Force Microscopy (LFM)
Phase Imaging
Scanning Ion Conductance Microscopy (SICM)
Force Measurement
Dielectric/Piezoelectric Properties
Electric Force Microscopy (EFM)
Piezoresponse Force Microscopy (PFM)
PFM with High Voltage*
Contact Resonance PFM (CR-PFM)*
Mechanical Properties
Force Modulation Microscopy (FMM)
Nanoindentation
Nanolithography*
Nanolithography with High Voltage*
Nanomanipulation*
Magnetic Properties
Chemical Properties*
Chemical Force Microscopy with Functionalized Tip
Electrochemical Microscopy (EC-AFM)
Scanning Ion Conductance Microscopy (SICM)
Scanning Electrochemical Cell Microscopy Single Barrel (SECCM Single Barrel)
Scanning Ion Conductance Microscopy-Scanning Electrochemical Microscopy (SICM-SECM)
Current-Distance (I/d) Spectroscopy (with SICM)
Thermal Properties*
Accessories*
• Liquid Probehand
• Universal Liquid Cell with Temperature Control
• Temperature Controlled Stage 1, 2 and 3
• Electrochemistry Cell
• GloveBox
• High-field Magnetic Field Generator
• Tilting Sample Chuck
• Snap-in Sample Chuck