Contact Sign In

Online Showcase

Large Sample AFM Revealed

Thank you for joining our exclusive online showcase where we unveiled the future of Large Sample AFM.

Key Features
High-Precision & Versatile Performance
  • ▪ Ensures minimal thermal drift and exceptional stability with an advanced mechanical structure
  • ▪ Accommodates a wide range of sample sizes, from small specimens to 300 mm wafers
  • ▪ Supports advanced nano-IR spectroscopy (PiFM) for precise chemical analysis
Simplified Workflow with Automated Features
  • ▪ Automatic probe exchange with 16 slots for efficient multi-experiment setups
  • ▪ Streamlines setup with automated tip mounting and laser beam alignment
  • ▪ StepScan™ feature for automated sequential measurements at multiple coordinates
  • ▪ Macro optics with wide field of view, covering 200 mm wafer samples
Specialized Features for Industrial AFM Applications
  • ▪ Specialized industrial R&D applications with recipe-based routine measurements.
  • ▪ Integrated industrial-grade facility featuring a signal tower with an emergency-off unit, a facility controller, and optional contamination control solutions using a fan filter unit
FX40 with monitor

Park nano-IR Spectroscopy

Advanced Nano-IR Spectroscopy for Large Sample Chemical Analysis

Park nano-IR is an integrated infrared (IR) spectroscopy and atomic force microscopy (AFM) system. The spectroscopy part provides chemical identification under 5 nm spatial resolution. It uses a non-contact technique offering the safest spectroscopy scanning and the best in industry spatial resolution. The microscopy part provides nanometer 3D topography with sub-angstrom height accuracy and mechanical property information to the user.

Learn More >
Which Large Sample AFM is right for you?
FX200_img
FX200
The Most Advanced AFM for Samples from Small Sizes up to 200 mm
More Information >
FX300_img
FX300
Premier 300 mm AFM for Research, Quality Control, and Assurance
More Information >
Applications
Park FX Large Sample AFM provides precise measurements from the nanoscale to 300 mm wafers, making it the ideal solution in research and industry fields.

Semiconductor

Patterned Si Device

Semiconductor

Cu Pad

Polymer

Hyper-branched Polymer

Polymer

Polystyrene Beads on Mica
ㅤ

2D Materials

Moiré Superlattice in Twisted Bilayer Graphene on hBN

Nanoscale IR Spectroscopy

PiFM Image on e-Beam Damaged ArF Photo Resist

Nanomechanical Applications

Battery Film Diaphragm

Nanoelectrical Applications

Perovskite
FX40 with monitor

Unlock FX200 Advantage

Transform your AFM workflows with powerful automation

The FX200 is the latest large-sample Atomic Force Microscope (AFM) designed to enhance nanoscale surface analysis with advanced automation. This technical note provides a detailed overview of its key features, automation capabilities, improved sample navigation, StepScan technology, and experimental management system.

More Information >