2021 Park AFM Certification Course: Lecture #7: SCM
SPEAKERS
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Ben Schoenek
Park Systems Inc., Santa Clara, California, USA
- Ben Schoenek is a Senior Technical Service Engineer for Park Systems, where he focuses on service and support of AFM systems for Park’s research user base. He received his Master’s in Physics from Auburn University, and holds a B.A. in Physics from Kenyon College.
- Access Speaker Publications
SPEAKERS
-
- Ben Schoenek
- Park Systems Inc., Santa Clara, California, USA
Authors
What is Scanning Capacitance Microscopy (SCM)?
We will engage in a lecture exploring the finer details of the configuration of Park’s SCM, the principle of SCM, the theory of the SCM measurement based on the capacitance-voltage curve of material, and the applications of SCM in the analysis of dopant profile in semiconductors using a Park Systems AFM.
Q&A session will be followed after the lecture contents.
Interactive Demo Session for SCM:
Lecture topics will be reinforced through demonstration Park Systems’ Scanning SCM mode on a Park Systems NX series AFM. A metal-oxide-semiconductor sample with different dopant type and dopant level will be used. AFM operator controls lock-in amplifier settings with emphasis on how to reveal dopant types and dopant level.
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