Patterned Si Device

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Scanning Conditions

- System: Park FX200
- Scan Mode: NCM
- Scan Rate: 1 Hz
- Scan Size: 15 µm × 15 µm
- Pixel Size: 1024 × 256
- Cantilever: SCOUT 350  (k=42 N/m, f=350 kHz)

Application

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True Non-Contact™ Mode

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