Cu Pad Oxidation

cu_pad_oxidation.JPG

 

Oxidation on a Cu pad was characterized in True Non-contact mode. The scan revealed a peak-to-valley height difference of 120.7 nm, and the image shows localized oxidation features on the pad surface.


 

 

Scanning Conditions


- System: NX20 300mm
- Scan Mode: True Non-contact
- Scan Rate: 1 Hz
- Scan Size: 40 µm × 40 µm
- Pixel Size: 1024 × 512 pixels
- Peak-to-valley: 120.7 nm

Application

Related Products

Related Modes

True Non-Contact™ Mode

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