Park Nanostandard
AFM Tip Characterizer (AFMTC)
Option Description
AFMTC sample consists of 10 Multiple Narrow Trenches (10 ~ 50 nm) and a 50 nm Isolated Line. This sample is designed to evaluate the shape characterization of AFM tips.
Specifications
- Trench widths : 10 / 13 / 16 / 19 / 22 / 26 / 30 / 35 /40 / 50 nm
- Line widths : 50 nm
- Step height : 100 nm (not certified)
- Pattern length : 4.0 mm (certified region: 3 mm from center)
- Material : Polycrystalline silicon
- Traceability: KOLAS (KRISS) traceable via ISO 17034:2016
Explore Other AFM Options
Step Height Reference (SHR-100)
XYZ Scale Calibrator (XSC12-100)
Z Scale Calibrator (ZSC12-200)