Z スキャナー ヘッド
弊社は、Park AFMの精度を向上させるために、これまでにさまざまなZスキャナーーヘッドを開発してまいりました。
SLD for better cantilever deflection detection
Our heads use Super Luminescence Diode (SLD) to give the most accurate cantilever deflection detection available.
Independent Z-Scan range selection
Because our heads separate the XY scanner from the Z scanner, you have complete control over the Z scan range.
Standard NX AFM Head
The standard NX AFM head is a high speed Z scanner with 15 µm scan range. It is our default head for all of the NX-series AFMs.
Specifications
- Z scan range: 15 µm
- Resonant frequency of Z-scanner: > 9 kHz
- Detection type: Super-Luminescence Diode (830 nm)
- Noise floor: < 0.05 nm (typically 0.03 nm)
Long Travel NX AFM Head
The long travel NX AFM head gives extended Z scan range capability to the NX series of AFMs.
Specifications
- Z scan range: 30 µm
- Resonant frequency of Z-scanner: > 2.0 kHz
- Detection type: Super-Luminescence Diode (830 nm)
- Noise floor: < 0.05 nm (typically 0.03 nm)
SICM NX Head for NX10/NX12
The standard NX SICM head is a high force Z scanner with 15 µm scan range. It is optional head for NX10 and NX12 systems.
Specifications
- Z scan range: 15 µm
Includes a low-noise, high-precision current amplifier
Current noise in buffer: ≤ 650 fA
SICM Long Travel Head for NX10/NX12
The long travel NX SICM head provides extended Z scan range capability to NX10 and NX12 systems.
Specifications
- Z scan range: 30 µm
Includes a low-noise, high-precision current amplifier
Current noise in buffer: ≤ 650 fA