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Semiconductor device, Failure analysis
Scanning Conditions
- System: NX10
- Scan Mode: Conductive AFM
- Cantilever: CDT-Contr (k=0.5N/m, f=20kHz)
- Scan Size: 11μm×11μm
- Scan Rate: 1Hz
- Pixel: 512×512
- Sample bias: -0.5V