Defects on Si wafer
Scanning Conditions
- System: Park FX300
- Scan Mode: True Non-contact™ mode
- Scan Rate: 1 Hz
- Scan Size: 20 µm × 20 µm
- Pixel Size: 4096 × 512 pixels
- Peak-to-valley: 33.6 nm
Application
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Related Modes
True Non-Contact™ Mode
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