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    AFM Specifications

Park XE7 Specifications

XY Scanner

Single-module flexure XY scanner with closed-loop control
Scan range : 100μm x 100μm
                         50μm x 50μm
                         10μm x 10μm


Manual Stage

XY travel range : 13 × 13 mm
Z travel range : 29.5 mm
Focus travel range : 70 mm

Z Scanner range

Guided high-force Z scanner
Scan range : 12 µm
                         15 µm


Sample Mount

Sample size : Up to 100 mm
Thickness : Up to 20 mm



Direct on-axis vision of sample surface and cantilever
Coupled with 10× objective lens (20× optional)
Field-of-view : 480 × 360 µm
CCD : 1 Mpixel




Dedicated system control and data acquisition software
Adjusting feedback parameters in real time
Script-level control through external programs(optional)


AFM data analysis software



High performance DSP : 600 MHz with 4800 MIPS
Maximum 16 data images
Maximum data size : 4096 × 4096 pixels
Signal inputs : 20 channels of 16 bit ADC at 500 kHz samplings
Signal outputs : 21 channels of 16 bit DAC at 500 kHz settling
Synchronous signal : End-of-image, end-of-line, and end-of-pixel TTL signals
Active Q control (optional)
Cantilever spring constant calibration (optional)
CE Compliant
Power : 120 W
Signal Access Module (Optional)


AFM Modes
(*Optionally available)

Standard Imaging

True Non-Contact AFM
Basic Contact AFM
Lateral Force Microscopy (LFM)
Phase Imaging
Intermittent (tapping) AFM

Force Measurement*

Force Distance (FD) Spectroscopy
Force Volume Imaging

Dielectric/Piezoelectric Properties*

Electric Force Microscopy (EFM)
Dynamic Contact EFM (EFM-DC)
Piezoelectric Force Microscopy (PFM)
PFM with High Voltage

Mechanical Properties*

Force Modulation Microscopy (FMM)
Nanolithography with High Voltage
Piezoelectric Force Microscopy (PFM)

Magnetic Properties*

Magnetic Force Microscopy (MFM)
Tunable MFM

Optical Properties*

Tip-Enhanced Raman Spectroscopy (TERS)
Time-Resolved Photo Current Mapping (PCM)

Electrical Properties*

Conductive AFM
IV Spectroscopy
Kelvin Probe Force Microscopy (KPFM)
KPFM with High Voltage
Scanning Capacitance Microscopy (SCM)
Scanning Spreading-Resistance Microscopy (SSRM)
Scanning Tunneling Microscopy (STM)
Time-Resolved Photo Current Mapping (PCM)

Chemical Properties*

Chemical Force Microscopy with Functionalized Tip
Electrochemical Microscopy (EC-STM and EC-AFM)


Dimensions in mm

xe7 dimension

Park XE7 AFM Options

25 µm Z-scanner Head

Z scan range : 25 µm
Resonant frequency : 1.7 kHz
Laser type : LD (650 nm) or SLD (830 nm)
Noise floor : 0.03 nm (typical), 0.05 nm (maximum)

XE Optical Head

Optical access : top and side
Z scan range : 12 µm or 25 µm
Laser type : LD (650 nm) or SLD (830 nm)
Noise floor : 0.03 nm (typical), 0.05 nm (maximum)
Resonant frequency : 3 kHz (12 µm XE Head), 1.7 kHz (25 µm XE Head)

Magnetic Field Generator

Applies external magnetic field parallel to sample surface
Tunable magnetic field
Range : -300 to +300 gauss, -1500 to +1500 gauss
Composed of pure iron core & two solenoid coils

Clip-type Probehand

Can be used with an unmounted cantilever
Tip bias function available for EFM and Conductive AFM
Tip bias range : -10 V to +10 V
Support all the standard and advanced modes but STM, SCM, and in-liquid imaging

Liquid Cell

• Universal liquid cell
        Open or closed liquid cell with liquid/gas perfusion
        Temperature control range : 4 °C to +110 °C (in air), 4 °C to +70 °C (with liquid)
• Open/closed liquid cell
• Electrochemistry cell

Liquid Probehand

Designed for imaging in general liquid environment
Resistant to most buffer solutions including acid
Contact and Non-contact AFM imaging in liquid

Temperature Control Stages

Type 1 : 0 °C to +180 °C
Type 2 : Ambient to +250 °C
Type 3 : Ambient to +600 °C

Signal Access Module (SAM)

Enables access to various input/output signals for AFM
Scanner driving signal for the XY and Z scanners
Position signal for the XY and Z scanners
Cantilever deflection signals of the vertical/lateral direction
Bias signal for the sample and the cantilever
Driving signal for XE7
Auxiliary input signal to the system


Electrochemistry Cell
Universal Liquid Cell with Temperature Control
Sample Stages with Temperature Control
Magnetic Field Generator


Park XE7 - Specifications | Park Atomic Force Microscope

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