Visit Park Systems at CAS 2026 | Silver Sponsor
Park Systems and SCHAEFER SOUTHEAST EUROPE SRL will join the International Semiconductor Conference CAS 2026 as a Silver Sponsor, presenting advanced characterization solutions for semiconductor, MEMS and micro/nanoelectronics research.
Visit us to discover how Atomic Force Microscopy (AFM) and Digital Holographic Microscopy (DHM) can support research from nanoscale semiconductor characterization to dynamic MEMS analysis.
Plenary Talk
"Atomic Force Microscopy for Nanoscale Morphological and Electrical Characterisation of Semiconductors"
- Talk Date: Thursday, October 15, 2026 | 10:00
- Talk Venue: Room 1
- Speaker: Dr. James Kerfoot, Park Systems UK Ltd.
The presentation will highlight emerging AFM applications in semiconductor research, including nanoscale morphology and electrical characterization, automated measurement workflows, ferroelectric and memristive devices, dopant and carrier mapping, buried-interface characterization, and nanoscale chemical analysis using nano-IR spectroscopy.
Meet the Park Systems team at CAS 2026 and explore advanced metrology solutions for your semiconductor and MEMS research.