2021 Park AFM Certification Course: Lecture #6: Nanolithography
SPEAKERS
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Armando Melgarejo
Park Systems Inc., Santa Clara, California, USA
- Armando Melgarejo is an engineer for Park Systems, where he focuses on the installation and support of AFM systems for Park’s research user base. He holds a B.S. in Biotechnology Engineering from Autonomous University of Queretaro, Mexico. During his studies, he also spent a semester doing research in nanotechnology and molecular biology at Czech Technical University in Prague, Czech Republic. Other areas of expertise include diverse characterization techniques (AFM, SEM, RAMAN and IR), genetics and molecular and cell biology.
- Access Speaker Publications
SPEAKERS
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- Armando Melgarejo
- Park Systems Inc., Santa Clara, California, USA
Authors
How to create nanometer sized structures with ease?
An approximately one-hour lecture on the different methods of nanolithography and their operation principle (Anodic oxidation, scratching by constant force and by constant depth). SmartLitho software will be introduced and explained how to use. Nanomanipulation technique will also be mentioned. Questions are welcomed at any time during the lecture. Introductory Nanolithography Video (10 min).
Interactive Demo Session Six:
Interactive session will consist of demonstrating anodic oxidation and scratching on different samples. Lithography parameters will be explained with emphasis on drawing speed, humidity, and tip spring constant. Silicon wafer with nanoparticles and polycarbonate film will be used as demonstration samples. Questions are welcomed at any time during the session.
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