Crosstalk-free ferroelectric domain characterization via dual frequency resonance tracking PFM
SPEAKERS
  • Chris Jung
    Park Systems Corp., Suwon, Republic of Korea
Authors
Chris Jung
The importance of characterizing for Ferroelectric materials is increasing as demand for data storage, growing of 5G network and others. As the semiconductor device manufacturing process becomes under nanometer resolution and requiring the faster devices, it becomes important to analyze the ferroelectric domain characteristics in the nanoscale area. In general, PFM, an AFM mode that measures the piezo response domain based on the contact mode, is widely used to analyze the piezo characteristics in nanoscales. This webinar introduces three different PFM measurements, from conventional PFM, which has been in use for a long time. And thee contact resonance PFM using harmonics technology of cantilever with the sample surface to amplify signals. And finally, DFRT-PFM, which implements Crosstalk free technics to avoid the surface morphology artifact during PFM measurement. Each mode will be used to measure the same sample while examining each driving method, and each mode will show advantages and disadvantages of each. Through this webinar the goal is to help and provide information to AFM users choose the proper PFM mode that suits your samples.