TSV Cu pad oxidation​

 

Scanning Conditions

- System: NX-Wafer​
- Scan Mode: True Non-Contact™ Mode
- Scan Rate: 1 Hz​
- Scan Size: 40 µm×40 µm​​
- Pixel Size: 512×512​
- Cantilever: OMCL-AC160TS ​(k=26 N/m, f=300 kHz)​

Application

Related Products

Related Modes

True Non-Contact™ Mode

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