Park NX20 Specification
Scanner
Z Scanner
Guided high-force flexure scanner
Scan range : 15 µm (optional 30 µm)
Height noise level : 30 pm
0.5 kHz bandwidth, rms (typical)
XY Scanner
Single module flexure XY-scanner with dual servo closed-loop control
Scan range : 100 µm × 100 µm
(optional 50 µm × 50 µm)
Stage
Z stage range : 25 mm (Motorized)
Focus travel range : 15 mm (Motorized)
XY stage travel range : 150 mm x 150 mm (Motorized)
Sample Mount
Sample size : Open space up to 150 mm x 150 mm, thickness up to 20 mm (Optionally, up to 200 mm x 200 mm)
Sample weight : < 500 g
Optics
10x (0.23 NA) ultra-long working distance lens (1 µm resolution)
Direct on-axis vision of sample surface and cantilever
Field-of-view : 840 × 630 µm (with 10× objective lens)
CCD : 1 M pixel, 5 M pixel (optional)
Software
SmartScan™
Dedicated system control and data acquisition software
Adjusting feedback parameters in real time
Script-level control through external programs (optional)
XEI
AFM data analysis software
Electronics
Integrated functions
4 channels of flexible digital lock-in amplifier
Digital Q control
Signal processing
- ADC : 18 channels 4 high-speed ADC channels 24-bit ADCs for X, Y and Z scanner position sensor
- DAC : 17 channels 2 high-speed DAC channels 20-bit DACs for X, Y and Z scanner positioning
- Maximum data size : 4096 x 4096 pixels
External signal access
20 embedded signal input/output ports
5 TTL outputs : EOF, EOL, EOP, Modulation, and AC bias
AFM Modes
(*Optionally available)
Standard Imaging
True Non-Contact AFM
PinPoint™ AFM
Basic Contact AFM
Lateral Force Microscopy (LFM)
Phase Imaging
Tapping AFM
Force Measurement
Force Distance (F/d) Spectroscopy
Force Volume Imaging
Dielectric/Piezoelectric Properties
Electric Force Microscopy (EFM)
Dynamic Contact EFM (EFM-DC)
Piezoresponse Force Microscopy (PFM)
PFM with High Voltage*
Mechanical Properties
Force Modulation Microscopy (FMM)
Nanoindentation*
Nanolithography*
Nanolithography with High Voltage*
Nanomanipulation*
Magnetic Properties*
Magnetic Force Microscopy (MFM)
Tunable Magnetic Field MFM
Electrical Properties
Conductive AFM (C-AFM)*
IV Spectroscopy*
Kelvin Probe Force Microscopy (KPFM)
Scanning Capacitance Microscopy (SCM)*
Scanning Spreading-Resistance Microscopy (SSRM)*
Scanning Tunneling Microscopy (STM)*
Photo Current Mapping (PCM)*
Chemical Properties*
Chemical Force Microscopy with Functionalized Tip
Electrochemical Microscopy (EC-AFM)
AFM Options
Customize your AFM to handle any project
Automatic data collection and analysis lets you save time
The NX20 features Park's automation control software that automatically carries out AFM measurements of a sample according to your preset procedure (recipe). It can accurately collect data, perform pattern recognition, and do analysis using its onboard Cognex board and optics module, and export with almost no user in put so you have more time to do innovative research.
Sample Tilting Stage for Sidewall Imaging lets you see more
The NX20’s innovative architecture lets you detect the sidewall and surface of the sample, and measure their angle. This gives the unit the versatility you need to do more innovative research and gain deeper insights.
Innovative control design allows Park NX20 to quickly reach temperature equilibrium
Park NX20 also features active vibration isolation.
Encoders for Motorized Stage
• The encoded XY stage travels in 1 µm resolution with 2 µm repeatability
• The encoded Z stage travels in 0.1 µm resolution with 1 µm repeatability
• Dedicated small sample holder for electrical measurements
• Vacuum grooves to hold wafers
Temperature Control
· Temperature Controlled Stage 1: -25 °C to +170 °C
· Temperature Controlled Stage 2: Ambient to +250 °C
· Temperature Controlled Stage 3: Ambient to +600 °C
Dimensions in mm
