Park NX20 Lite Specifications
Scanner
Z Scanner
Flexure guided high-force scanner
Scan range: 15 μm (optional 30 μm)
XY Scanner
Single module flexure XY-scanner with closed-loop control
Scan range: 100 µm × 100 µm
Stage
Z stage
Motorized Z stage travel range: 25.5mm,
optional precision encoder for better stage repeatability
XY stage
Motorized XY stage travel range:
150 mm (200 mm optional),
optional precision encoders for better XY stage repeatability
Sample Mount
Sample size: Up to 150 mm wafer sample
Up to 200 mm wafer sample
(Optional 200 mm Vacuum Sample Chuck)
Software
SmartScan™
AFM system control and data acquisition software
Auto mode for quick setup and easy imaging
Manual mode for advanced use and finer scan control
SmartAnalysis™
AFM data analysis software
Stand-alone design—can install and analyze data away from AFM
Capable of producing 3D renders of acquired data
Dimensions in mm
