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Glass LightEmission FrictionalForceMicroscopy Materials hydrocarbon Workfunction Leakage PolyvinylideneFluoride TriGlycineSulphate EFM Inorganic_Compound Spain Hafnia LateralPFM ThermalProperties Piezoresponse LaAlO3 chemical_compound AnodizedAluminumOxide Semiconductor Led LMF Dental optoelectronics thermoplastic_elastomers HafniumDioxide PyroelectricDetector SingleLayer EFMAmplitude TempControl Etch temperature_control single_layer Korea cross section