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plastic CastIron Holes InorganicCompound LiNbO3 FFM lift_mode YszSubstrate suspended_graphene Tape ChemicalCompound LateralForce OpticalElement Ca10(PO4)6(OH)2 FailureAnalysis LDPE FM_SKPM ContactModeDots GranadaUniv Growth ImideMonomer NTU silicon_carbide DIWafer plastics Steps LiftMode SAM Ceramic ThermalProperties Etch NanoLithography SKPM temp Piranha