Park NX20

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Park NX20

The leading nano metrology tool for failure analysis and large sample research

As an FA engineer, you’re expected to deliver results. There’s no room for error in the data provided by your instruments. Park NX20, with its reputation as the world’s most accurate large sample AFM, is rated so highly in the semiconductor and hard disk industry for its data accuracy.

Easy to use, even for entry level engineers

Park NX20 has one of the most user friendly designs and automated interfaces in the industry, so you won’t have to spend as much time and energy using the tool and supervising junior engineers with the system. This lets you focus your experience on solving bigger problems and providing insightful and timely failure analysis to your customers.

QuickStep SCM Mode

High Throughput QuickStep Scan

With the implementation of QuickStep scan, the throughput of the SCM measurement was dramatically increased, as much as ten times the standard SCM scan speeds, without compromising signal sensitivity, spatial resolution or data accuracy. In QuickStep scan, the XY scanner stops at each pixel point to record the data. It makes a fast jump between the pixel points.

Ten times faster than conventional SCM scan
No compromise of signal sensitivity, spatial resolution, or data accuracy

QuickStep Scan

Rather than continuous movements, the XY scanner stop at each data acquisition point.

Scan rate 1.5Hz

Conventional Scan

Scan rate 1Hz

Scan size: 10µm×3µm, AC Bias: 0.5 Vp-v, DC Bias: 0 V

Accurate Dopant Profiling by Park SCM

In semiconductor manufacturing, the ability to characterize the dopant profile is important in identifying causes of failure as well as in making design advancements. For device characterization, scanning capacitance microscopy (SCM) provides the unique ability to measure quantitative 2D dopant profiles.

PinPoint Conductive AFM Mode

PinPoint Conductive AFM was developed for well defined electric contact between the tip and the sample. They XY scanner stops during the electric current acquisition with contact time controlled by a user. PinPoint Conductive AFM allows higher spatial resolution, without lateral force, with optimized current measurement over different sample surface.

PinPoint Mode

Contact

Tapping

_{Sample: ZnO nano-rods, -3 V sample bias}

The comparison of conductive AFM images of ZnO nanorods show that the conventional contact conductive AFM may have a higher current measurement than tapping conductive AFM, but its resolution is compromised as the tip wears out in contact mode topography. The new PinPoint conductive AFM shows the best of both higher spatial resolution and optimized current measurement.

High-bandwidth, Low-noise Conductive AFM

Conductive AFM is an important tool in various device research, especially failure analysis in industry. Park conductive AFM has the most competitive specification in the market, having both the lowest current noise level in the industry and the largest gain range.

The lowest current noise level in the industry (0.1 pA)
Maximum current in the industry (10 μA)
Largest gain selection covers 7 orders of magnitude (10³ ~10⁹)

Park NX20 advanced SPM modes (*Optionally available)

Standard Imaging

Electrical Characterization

General Characterization

Accurate AFM Solutions for FA and Research Laboratories

Sidewall measurements for 3D structure study

The NX20’s innovative architecture lets you detect the sidewall and surface of the sample, and measure their angle. This gives the unit the versatility you need to do more innovative research and gain deeper insights.

Surface roughness measurements for media and substrates

Surface roughness is one of the key applications where Park NX20 can excel and deliver the accurate failure analysis and quality assurance.
Read More related application

High resolution electrical scan mode

QuickStep SCM
The Fastest Scanning Capacitance Microscopy

PinPoint AFM
The Frictionless Conductive AFM

Accurate and Reproducible Measurements for Better Productivity

Tip lifetime performance data on polished silicon wafer: 15,000 scans @ 10Hz using 1 tip!

Reproduce Best AFM Measurement

True Non-Contact Mode preserves the sharp tip end even after imaging 200 images of CrN, so called tip check sample. CrN has very abrasive surface that may quickly wear out the sharp tip.

Accurate AFM Topography with Low Noise Z Detector

True Sample Topography™ without piezo creep error

Our AFMs are equipped with the most effective low noise Z detectors in the field, with a noise of .02 nm over large bandwidth. This produces highly accurate sample topography, no edge overshoot and no need for calibration. Just one of the many ways Park AFM saves your time and gives you better data.

Low noise Z detector signal is used for topography
Low Z detector noise of 0.02 nm over large bandwidth

No edge overshoot at the leading and trailing edges
Calibration needs to be done only once at the factory

Park NX AFM

Conventional AFM

Park NX20 features

2D Flexure-Guided Scanner with 100 µm x 100 µm Scan Range

The XY scanner consists of symmetrical 2-dimensional flexure and high-force piezoelectric stacks provides high orthogonal movement with minimal out-of-plane motion as well as high responsiveness essential for precise sample scanning in the nanometer scale.

Low Noise XYZ Position Sensors

The industry leading low noise Z detector replaces the applied Z voltage as the topography signal. In addition, the low noise XY closed loop scan minimizes the forward and backward scan gap to be less than 0.15% of the scan range.

Step Scan Automation

Using the motorized sample stage, Step-and-Scan enables user-programmable multiple region imaging. The Step-and-Scan process consists of:

1) Scan an image
2) Lift the cantilever
3) Move the motorized stage to a user defined coordinate
4) Approach
5) Repeat the scan

This automated feature increases productivity by minimizing user assistance during repetitive imaging processes.

Auto Engage by Slide-to-Connect SLD Head

The AFM head is easily inserted or removed by sliding it along a dovetail rail. This automatically locks the head into its pre-aligned position and connects it to the control electronics with a positioning repeatability of a few microns. The low coherency of the Super Luminescence Diode (SLD) enables accurate imaging of highly reflective surfaces and precise measurements for pico-Newton Force-distance spectroscopy. The SLD wavelength eliminates interference issues for users interested in combining the AFM with experiments in the visible spectrum.

Expansion Slot for Advanced SPM Modes and Options

Advanced SPM modes are enabled by simply plugging an option module to the expansion slot. The modular design of the NX-series AFM allows option compatibility throughout its product line.

High Speed 24-bit Digital Electronics

All NX-series AFMs are controlled and processed by the same NX electronics controller. The controller is an all digital, 24-bit high speed electronics unit, which insures the speed and accuracy of Park’s True Non-Contact ModeTM for accuracy and speed. With its low noise design and high speed processing unit, the controller is ideal for nanoscale imaging and precise voltage and current measurements. The embedded digital signal processing capability adds to the functionality and economics of our AFM solutions for advanced researchers.

24-bit signal resolution for XY and Z detectors
• 0.003 nm resolution in XY (50 μm XY)
• 0.001 nm resolution in Z (15 μm Z)

Embedded digital signal processing capability
• 3 channels of flexible digital lock-ins • Spring constant calibration (thermal method)
• Digital Q control included

Intergrated signal access ports
• Dedicated and programmable signal input/output ports
• 7 inputs and 3 outputs

High Speed Z Scanner with 15 µm Scan Range

Driven by a high-force piezoelectric stack and guided by a flexure structure, the standard Z scanner has a high resonant frequency of more than 9 kHz (typically 10.5 kHz), and Z-servo speed of more than 48 mm/sec tip velocity which enables accurate feedback. The maximum Z scan range can be extended from 15µm to 30µm with the optional long scan range Z scanner.

Motorized XY Sample Stage with Optional Encoders

The encoders, used on all motorized stages, enable higher positioning repeatability for accurate sample positioning. The encoded XY stage travels in 1 µm resolution with 2 µm repeatability, and the encoded Z stage, in 0.1 μm resolution with 1 μm repeatability.

Accessible Sample Holder

The unique head design allows for an open side access to sample and tip. The maximum sample size one can place on the stage is either 150 mm diameter x 20 mm or 200 mm diameter x 20 mm depending on the travel range option chosen for the XY sample stage.

Direct On-Axis High Powered Optics with Integrated LED Illumination

Custom designed objective lens with ultra long working distance (51 mm, 0.21 NA, 1.0 µm resolution) provides direction on-axis optical view with unprecedented clarity. The intuitive direct on-axis sample view from the top allows users to navigate the sample surface easily to find the target area. For a higher vision resolution the EL20x objective lens of Long Travel Head is used, which has 20 mm working distance, 0.42 NA, and 0.7 µm resolution. The enlarged sensor size of the CCD provides wide field of view of the sample without compromising the optics resolution. The software-controlled LED light source provides ample illumination onto the sample surface for clear sample observation.

Vertically Aligned Motorized Z Stage and Focus Stage

The Z stage and focus stage engage the cantilever with the sample surface while constantly maintaining a clear field of vision for the user. And because the focus stage is motorized and software controlled, it has the precision necessary for transparent samples and liquid cell applications.

Park NX20 Specification

Scanner

Z Scanner

AFM Head
Flexure guided high-force scanner
Scan range: 15 µm (optional 30 µm)

SICM Head
Flexure-guided structure driven by
multiply-stacked piezoelectric stacks
Scan range: 15 µm (optional 30 µm)

XY Scanner

Single module flexure XY-scanner with dual servo closed-loop control
Scan range : 100 µm × 100 µm
(optional 50 µm × 50 µm)

Stage

XY stage travel range: 200 mm (Motorized) (150 mm optional), optional precision encoders for better XY stage repeatability
Z stage travel range: 25 mm (Motorized), optional precision encoders for better Z stage repeatability
Focus stage travel range: 15 mm (Motorized)

Sample Mount

Sample size : Up to 150 mm wafer (optional: up to 200 mm wafer) or 1 small sample (10 mm x 10 mm, 20 mm thickness)
Vacuum grooves to hold wafer samples
Up to 16 small samples (10 mm x 10 mm, 20 mm thickness) (Optional Multi Sample Chuck)

On-Axis Optics

10x (0.21 N.A.) ultra-long working distance lens (1µm resolution)
Direct on-axis vision of sample surface and cantilever
Field-of-view : 840 × 630 µm (with 10× objective lens)
CCD : 5 M pixel

Software

SmartScan™

• AFM system control and data acquisition software
• Auto mode for quick setup and easy imaging
• Manual mode for advanced use and finer scan control

SmartAnalysis™

• AFM data analysis software
• Stand-alone design—can install and analyze data away from AFM
• Capable of producing 3D renders of acquired data

Electronics

4 channels of flexible digital lock-in amplifier
Spring constant calibration (Thermal method)
Digital Q control

Options/Modes

Accessories*

• Universal Liquid Cell with Temperature Control
• Temperature Controlled Stage 1, 2 and 3
• Electrochemistry Cell
• Glove Box
• High-field Magnetic Field Generator
• Tilting Sample Chuck
• Snap-in Sample Chuck

Dimensions in mm

The leading nano metrology tool for failure analysis and large sample research

More powerful failure analysis solutions

Easy to use, even for entry level engineers

QuickStep SCM Mode

High Throughput QuickStep Scan

QuickStep Scan

Conventional Scan

Accurate Dopant Profiling by Park SCM

PinPoint Conductive AFM Mode

PinPoint Mode

Contact

Tapping

High-bandwidth, Low-noise Conductive AFM

Park NX20 advanced SPM modes (*Optionally available)

Standard Imaging

Electrical Characterization

General Characterization

Accurate AFM Solutions for FA and Research Laboratories

Sidewall measurements for 3D structure study

Surface roughness measurements for media and substrates

High resolution electrical scan mode

Accurate and Reproducible Measurements for Better Productivity

Tip lifetime performance data on polished silicon wafer: 15,000 scans @ 10Hz using 1 tip!

Reproduce Best AFM Measurement

Accurate AFM Topography with Low Noise Z Detector

True Sample Topography™ without piezo creep error

Park NX AFM

Conventional AFM

Park NX20 features

Park NX20 Specification

Scanner

Z Scanner

XY Scanner

Stage

Sample Mount

On-Axis Optics

Software

SmartScan™

SmartAnalysis™

Electronics

Options/Modes

Standard Imaging

Force Measurement

Dielectric/Piezoelectric Properties

Mechanical Properties

Magnetic Properties

Electrical Properties

Chemical Properties*

Thermal Properties*

Accessories*

Dimensions in mm

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